Application of visual inspection system for semiconductor IC appearance

Date：2021-12-16 18:03:11 Views：1328

With the development of modern industrial science and technology, machine vision detection system is widely used in various fields, from medical images to remote sensing images, from industrial production detection to file processing, from nano technology to multimedia database, almost all occasions requiring human vision require machine vision detection system, especially in some fields that require high requirements or cannot be perceived by human vision, For example, accurate quantitative perception, dangerous scene perception, invisible object perception and so on, the role of machine vision detection system is particularly important.

With the rapid development of microelectronics technology, the integration of various semiconductor chips is becoming higher and higher. At the same time, the volume of the chip tends to be miniaturized and miniaturized, which puts forward higher requirements for the detection of the chip. The mass production on site makes the traditional manual visual inspection difficult to meet the actual needs.

The advantages of non-contact, continuity, economy and flexibility of machine vision detection make people have a better choice. Manual detection is gradually replaced by machine vision detection. The application of machine vision detection system to semiconductor detection is mainly through positioning the real-time captured image by pattern matching, analyzing and processing the image and obtaining various parameters of the image, Compare and calculate with the preset detection standard, and then judge whether the image is qualified or not.

1. Non contact

As an accurate detection equipment, machine vision detection measures the detected object by analyzing and processing the detected object image. No contact is required in the measurement process, so there is no wear and danger to the measured object, and nondestructive testing is realized.

2. Continuity

The advantages of machine vision detection system are obvious. It is unreliable to use human as a machine. Compared with human eyes, the machine not only will not be tired, but also has consistency and repeatability that human does not have, and can operate continuously for a long time.

In addition, since there is no manual operator, there is no man-made operation change, and multiple systems can be set to operate independently.

3. Accuracy

In recent years, due to the miniaturization of chip packaging, the increase of production complexity and the continuous enhancement of productivity, coupled with the wide use of various new components, the quality and efficiency of the production line can not be guaranteed only by using human eyes in the packaging and assembly line of semiconductor chips. The speed and accuracy of detection are the bottleneck restricting the further improvement of chip productivity and quality for a long time.

How to match the speed of packaging production and realize 99.99% on-line detection has always been the most concerned problem of semiconductor manufacturers. The detection speed and accuracy is an obvious advantage of machine vision detection. The rapidly changing machine vision detection system is replacing people for full-automatic product detection.

4. Economy

With the gradual maturity of visual inspection technology and the reduction of the price of processing hardware equipment, the economy of machine vision inspection gradually appears. A machine vision inspection system can replace multiple manual inspectors. In addition, the operation and maintenance costs of machine vision detection are relatively low.

5. Scalability

The machine vision system can make various measurements. Machine vision system has better adaptability, diversity, flexibility and reconfigurability than optical and machine sensors. When the detection process needs to be changed, for the machine vision system, "tool replacement" is only to update the software, not to upgrade the expensive hardware. When the production line is reorganized, the machine vision system can often be retained and continue to be used.

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