Description:

Energy-dispersive X-ray Spectrometer (EDS/EDX/XEDS), is an important auxiliary instrument for electron microscopes such as Scanning Electron Microscopes (SEM) and Transmission Electron Microscopes (TEM). It utilizes characteristic X-rays excited by electron beams impacting the sample to perform qualitative or semi-quantitative chemical composition analysis of the specimens.

EDS is commonly used in conjunction with imaging analysis tools like SEM, TEM, and Scanning Transmission Electron Microscope (STEM). When combined with these imaging tools, EDS can provide elemental analysis of areas as small as nanometers in diameter. The electron beam bombardment of the sample generates characteristic X-rays of the sample’s elements. EDS analysis can be used to determine the elemental composition of a single point, generate two-dimensional/three-dimensional imaging of element distribution through mapping, or perform one-dimensional elemental distribution analysis through EDS line scanning.

Scope of Application: 

elemental analysis of sample, counterfeit detection of passive components.

Testing Images:

Electronic Image                       Spectrogram

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